Measuring a photodiode’s RF bandwidth before the wafer is diced
- Why it’s hard
- Bandwidth is normally measured on packaged parts; on the wafer the light arrives through edge couplers in trenches and the signal leaves through a probe.
- What I did
- Integrated a vector network analyser with an electrical-to-optical converter into the wafer prober: light from the converter enters the device through the fibre array, an RF probe picks up its response, and the analyser sweeps S21.
- Result
- S21 and 3 dB bandwidth measured at the wafer level, at several bias voltages.